Inventor
Paritosh Rajora
Inventor
Petaluma, CA, US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1057%
H01JElectric discharge tubes or discharge lamps29%
H10DInorganic electric semiconductor devices14%
PatentTitleYear
6,774,046'Method for minimizing the critical dimension growth of a feature on a semiconductor wafer'20046,492,280'Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls'20026,127,277'Method and apparatus for etching a semiconductor wafer with features having vertical sidewalls'20006,046,116'Method for minimizing the critical dimension growth of a feature on a semiconductor wafer'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2004Patents assigned to TEGAL CORP (4)· patent assignee history
2000–2004Based in Petaluma, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TEGAL CORP | 4 | 2000–2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| Petaluma, California, US | 4 | 2000–2004 |