Inventor
Takanori Banse
Inventor
Miyagi, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps24%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H05HPlasma technique12%
B08BCleaning in general4%
C23CCoating metallic material4%
G01BMeasuring length, thickness or similar linear dimensions4%
G01SRadio direction-finding4%
G06FElectric digital data processing4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
PatentTitleYear
10,825,662Method for driving member and processing apparatus202010,770,268Plasma processing method and plasma processing apparatus202010,707,088Method of processing target object202010,692,726Method for processing workpiece202010,546,723Plasma processing method20209,818,582'Plasma processing method'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2020Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2017–2020Based in Miyagi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 2017–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 6 | 2017–2020 |