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Inventor

Fu-Sheng Lee

Inventor
Taichung, TW

Overview

4→
Patents
2001–2003
Patent span
Performing operations
Primary field (CPC B)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B24Bprimary
B24BMachines, devices, or processes for grinding or polishing40%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1020%
PatentTitleYear
6,528,836'Photomask ESD protection and an anti-ESD pod with such protection'20036,503,124'Method for endpoint detection for copper CMP'20036,225,226'Method for processing and integrating copper interconnects'20016,179,691'Method for endpoint detection for copper CMP'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2003Patents assigned to TAIWAN SEMICONDUCTOR MFG (4)· patent assignee history
2001–2003Based in Taichung, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG42001–2003
Locations
LocationPatentsSpan
Taichung, TW42001–2003