Inventor
Shunji Sasabe
Inventor
Iruma, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices21%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material14%
H01JElectric discharge tubes or discharge lamps14%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light7%
H10DInorganic electric semiconductor devices7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests7%
PatentTitleYear
6,497,992'Process for manufacturing semiconductor integrated circuit device'20026,057,081'Process for manufacturing semiconductor integrated circuit device'20005,972,862'Cleaning liquid for semiconductor devices'19995,235,399'Temperature measuring apparatus utilizing radiation'19935,060,045'Semiconductor integrated circuit device and method of manufacturing the same'19915,021,114'Apparatus for treating material by using plasma'19914,717,462'Sputtering apparatus'1988Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1988–2002Patents assigned to HITACHI LTD (6)· patent assignee history
1988–2002Based in Iruma, JP· patent location history
1999Patents assigned to MITSUBISHI GAS CHEMICAL CO (1)· patent assignee history
1999Based in Saitama, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI LTD | 6 | 1988–2002 |
| MITSUBISHI GAS CHEMICAL CO | 1 | 1999 |
Locations
| Location | Patents | Span |
|---|---|---|
| Iruma, JP | 6 | 1988–2002 |
| Saitama, JP | 1 | 1999 |