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Inventor

Hiraku Murakami

Inventor
Miyagi, JP

Overview

3→
Patents
2017–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps38%
B08BCleaning in general13%
H01LSemiconductor devices13%
H05BElectric heating13%
H05HPlasma technique13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
PatentTitleYear
10,553,409Method of cleaning plasma processing apparatus202010,264,630Plasma processing apparatus and method for processing object20199,818,582'Plasma processing method'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017–2020Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2017–2020Based in Miyagi, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32017–2020
Locations
LocationPatentsSpan
Miyagi, JP32017–2020