Inventor

Liang-Guang Chen

Inventor

Hsinchu, TW

Overview

37→

Patents

2006–2020

Patent span

Electricity

Primary field (CPC H)

Patents· 37 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%

H01LSemiconductor devices23%

H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1017%

H10DInorganic electric semiconductor devices15%

B24BMachines, devices, or processes for grinding or polishing10%

B08BCleaning in general4%

A46BBrushes2%

B24DTools for grinding, buffing or sharpening2%

C09GPolishing compositions2%

C09KMaterials for miscellaneous applications, not provided for elsewhere1%

PatentTitleYear

10,847,359Method for metal gate surface clean2020 10,755,934Systems and methods for chemical mechanical polish and clean2020 10,692,732CMP slurry and CMP method2020 10,636,701Methods of forming semiconductor devices using multiple planarization processes2020 10,515,808Systems and methods for chemical mechanical polish and clean2019 10,510,601Method for reducing metal plug corrosion and device2019 10,504,782Fin Field-Effect Transistor device and method of forming the same2019 10,269,555Post-CMP cleaning and apparatus2019 10,157,781Method for forming semiconductor structure using polishing process2018 10,062,645Interconnect structure for semiconductor devices2018 9,987,720Method for operating a polishing head and method for polishing a substrate2018 9,962,805Chemical mechanical polishing apparatus and method2018 9,917,173'Oxidation and etching post metal gate CMP'2018 9,768,064'Formation method of semiconductor device structure'2017 9,723,915'Brush cleaning method'2017 9,679,848'Interconnect structure for semiconductor devices'2017 9,633,832'Method for metal gate surface clean'2017 9,630,295'Mechanisms for removing debris from polishing pad'2017 9,564,511'Oxidation and etching post metal gate CMP'2017 9,553,161'Mechanism for forming metal gate structure'2017 9,460,997'Interconnect structure for semiconductor devices'2016 9,449,841'Methods and systems for chemical mechanical polish and clean'2016 9,352,443'Platen assembly, chemical-mechanical polisher, and method for polishing substrate'2016 9,305,880'Interconnects for semiconductor devices'2016 9,272,386'Polishing head, and chemical-mechanical polishing system for polishing substrate'2016 9,269,585'Method for cleaning metal gate surface'2016 9,252,060'Reduction of OCD measurement noise by way of metal via slots'2016 9,209,272'Oxidation and etching post metal gate CMP'2015 9,209,040'Amorphorus silicon insertion for STI-CMP planarity improvement'2015 9,119,464'Brush cleaning system'2015 9,076,766'Mechanism for forming metal gate structure'2015 8,975,179'Planarization process for semiconductor device fabrication'2015 8,703,612'Process for forming contact plugs'2014 8,598,028'Gate height loss improvement for a transistor'2013 8,348,719'Polisher for chemical mechanical planarization'2013 8,021,566'Method for pre-conditioning CMP polishing pad'2011 7,105,446'Apparatus for pre-conditioning CMP polishing pad'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006–2016Patents assigned to TAIWAN SEMICONDUCTOR MFG (10)· patent assignee history

2006–2011Based in Yilan County, TW· patent location history

2013–2016Patents assigned to CHEN LIANG-GUANG (6)· patent assignee history

2013–2015Patents assigned to CHEN YING-TSUNG (2)· patent assignee history

2013–2015Patents assigned to HONG WEILUN (2)· patent assignee history

2013–2020Based in Hsinchu, TW· patent location history

2015–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (27)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
TAIWAN SEMICONDUCTOR MFG CO LTD	27	2015–2020
TAIWAN SEMICONDUCTOR MFG	10	2006–2016
CHEN LIANG-GUANGself	6	2013–2016
CHEN YING-TSUNG	2	2013–2015
HONG WEILUN	2	2013–2015

Locations

Location	Patents	Span
Hsinchu, TW	35	2013–2020
Yilan County, TW	2	2006–2011