LexDanaLexDanabeta
Inventor

Kyo Otsubo

Inventor
Shinagawa-ku, JP

Overview

2→
Patents
2019–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general25%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
PatentTitleYear
10,692,715Method for cleaning substrate and substrate processing apparatus202010,486,203Substrate production method, substrate processing apparatus, and substrate production system2019

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2019–2020Patents assigned to TOSHIBA MEMORY CORP (2)· patent assignee history
2019–2020Based in Shinagawa-ku, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOSHIBA MEMORY CORP22019–2020
Locations
LocationPatentsSpan
Shinagawa-ku, JP22019–2020