Inventor
Evan R. Mapoles
Inventor
San Ramon, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties43%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
G01RMeasuring electric variables14%
G02BOptical elements, systems or apparatus14%
PatentTitleYear
7,505,619'System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface'20097,436,503'Dark field inspection apparatus and methods'20087,106,434'Inspection tool'20067,106,432'Surface inspection system and method for using photo detector array to detect defects in inspection surface'20066,989,515'Imaging stabilization apparatus and method for high-performance optical systems'20066,617,555'Imaging stabilization apparatus and method for high-performance optical systems'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003Patents assigned to ULTRATECH STEPPER INC (1)· patent assignee history
2003–2009Based in San Ramon, CA, US· patent location history
2006–2009Patents assigned to KLA TENCOR TECH CORP (3)· patent assignee history
2006Patents assigned to KLA TENCOR TECHNOLOGIES INC (1)· patent assignee history
2006Patents assigned to ULTRATECH INC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR TECH CORP | 3 | 2006–2009 |
| KLA TENCOR TECHNOLOGIES INC | 1 | 2006 |
| ULTRATECH INC | 1 | 2006 |
| ULTRATECH STEPPER INC | 1 | 2003 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Ramon, California, US | 6 | 2003–2009 |