Inventor
Duygu Akbulut
Inventor
Eindhoven, NL
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
G01BMeasuring length, thickness or similar linear dimensions20%
G02BOptical elements, systems or apparatus20%
G01NInvestigating or analysing materials by determining their chemical or physical properties17%
G01DMeasuring not specially adapted for a specific variable3%
PatentTitleYear
11,086,240Metrology sensor, lithographic apparatus and method for manufacturing devices202111,042,100Measurement apparatus and method of measuring a target202110,908,514Metrology apparatus, lithographic system, and method of measuring a structure202110,788,766Metrology sensor, lithographic apparatus and method for manufacturing devices202010,527,959Position sensor, lithographic apparatus and method for manufacturing devices202010,444,640Metrology apparatus, lithographic system, and method of measuring a structure201910,317,808Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method201910,234,767Device and method for processing a radiation beam with coherence201910,185,224Method and apparatus for inspection and metrology201910,126,659Method and apparatus for inspection and metrology20189,927,722'Method and apparatus for inspection and metrology'20189,811,001'Method and apparatus for inspection and metrology'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017–2021Patents assigned to ASML NETHERLANDS BV (12)· patent assignee history
2017–2021Based in Eindhoven, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 12 | 2017–2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Eindhoven, NL | 12 | 2017–2021 |