LexDanaLexDanabeta
Inventor

Hsin-Chang Lee

Inventor
Zhubei, TW

Overview

4→
Patents
2003–2021
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01JElectric discharge tubes or discharge lamps13%
H01LSemiconductor devices13%
LOC1313%
PatentTitleYear
11,119,398EUV photo masks202111,106,126Method of manufacturing EUV photo masks202111,086,215Extreme ultraviolet mask with reduced mask shadowing effect and method of manufacturing the same2021D0480361'Grounding casing for electric facility'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003Patents assigned to TIGER TECHNOLOGY INC (1)· patent assignee history
2003Based in Chong Ho, TW· patent location history
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (3)· patent assignee history
2021Based in Zhubei, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD32021
TIGER TECHNOLOGY INC12003
Locations
LocationPatentsSpan
Zhubei, TW32021
Chong Ho, TW12003