Inventor
YUKIHISA WADA
Inventor
JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
A61BDiagnosis11%
C09KMaterials for miscellaneous applications, not provided for elsewhere11%
C23FNon-mechanical removal of metallic material from surface11%
G01NInvestigating or analysing materials by determining their chemical or physical properties11%
H01LSemiconductor devices11%
C11DDetergent compositions6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
G06TImage data processing or generation, in general3%
G21KHandling of particles or ionising radiation not otherwise provided for3%
PatentTitleYear
12,593,639Method for processing substrate, chemical solution, and method for providing chemical solution202612,187,943Chemical solution used for cleaning or etching ruthenium-containing layer and method for fabricating ruthenium wiring202512,104,260Method for producing semiconductor element and chemical solution to be used in method for producing semiconductor element202411,898,081Ruthenium-etching solution, method for manufacturing ruthenium-etching solution, method for processing object to be processed, and method for manufacturing ruthenium-containing wiring202411,686,002Method for manufacturing ruthenium wiring202311,518,937Etching solution and method for manufacturing semiconductor element202211,327,029X-ray imaging device202211,311,260X-ray phase imaging apparatus202211,272,894X-ray imaging device202211,268,916X-ray phase imaging system202211,179,124X-ray phase imaging method2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2022Patents assigned to SHIMADZU CORP (5)· patent assignee history
2021–2026Based in JP· patent location history
2022–2026Patents assigned to TOKYO OHKA KOGYO CO LTD (6)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO OHKA KOGYO CO LTD | 6 | 2022–2026 |
| SHIMADZU CORP | 5 | 2021–2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 11 | 2021–2026 |