Inventor
Mitiaki Matsushita
Inventor
Yatsushiro, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices20%
A46BBrushes7%
PatentTitleYear
6,746,197'Substrate processing apparatus and substrate processing method'20046,655,891'Substrate treatment system, substrate transfer system, and substrate transfer method'20036,439,822'Substrate processing apparatus and substrate processing method'20026,425,722'Substrate treatment system, substrate transfer system, and substrate transfer method'20026,074,154'Substrate treatment system, substrate transfer system, and substrate transfer method'20005,685,039'Cleaning apparatus'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2004Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
1997–2003Based in Yatsushiro, JP· patent location history
2002–2004Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 1997–2004 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yatsushiro, JP | 4 | 1997–2003 |
| Kumamoto, JP | 2 | 2002–2004 |