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Inventor

Youping Zhang

Inventor
Dublin, OH, US

Overview

2→
Patents
2021
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
G01NInvestigating or analysing materials by determining their chemical or physical properties25%
G06FElectric digital data processing25%
PatentTitleYear
11,092,900Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method202111,079,684Measurement apparatus and a method for determining a substrate grid2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to ASML NETHERLANDS BV (2)· patent assignee history
2021Based in Dublin, OH, US· patent location history
2021Based in Cupertino, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV22021
Locations
LocationPatentsSpan
Dublin, OH, US12021
Cupertino, California, US12021