Inventor
Paul Doyle
Inventor
San Jose, CA, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
G01NInvestigating or analysing materials by determining their chemical or physical properties15%
G02BOptical elements, systems or apparatus10%
H01LSemiconductor devices10%
Y10TTechnical subjects covered by former us classification10%
B08BCleaning in general5%
B25BTools or bench devices not otherwise provided for, for fastening, connecting, disengaging, or holding5%
F16CShafts5%
G01BMeasuring length, thickness or similar linear dimensions5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
PatentTitleYear
10,914,916Non-adhesive mounting assembly for a tall Rochon polarizer202110,784,136FOUP purge shield202010,451,542Local purge within metrology and inspection systems20199,810,619'Method and system for simultaneous tilt and height control of a substrate surface in an inspection system'20178,995,066'Passive position compensation of a spindle, stage, or component exposed to a heat load'20158,817,250'Air bearing for substrate inspection device'20148,042,254'Method for improving edge handling chuck aerodynamics'20117,607,647'Stabilizing a substrate using a vacuum preload air bearing chuck'2009Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2009–2017Based in San Jose, CA, US· patent location history
2011–2017Patents assigned to KLA TENCOR CORP (4)· patent assignee history
2014–2015Patents assigned to BELYAEV ALEXANDER (2)· patent assignee history
2014–2015Patents assigned to DOYLE PAUL (2)· patent assignee history
2014Patents assigned to DANDO HOWARD W (1)· patent assignee history
2019–2021Based in Milpitas, CA, US· patent location history
2020–2021Patents assigned to ONTO INNOVATION INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA TENCOR CORP | 4 | 2011–2017 |
| BELYAEV ALEXANDER | 2 | 2014–2015 |
| DOYLE PAULself | 2 | 2014–2015 |
| ONTO INNOVATION INC | 2 | 2020–2021 |
| DANDO HOWARD W | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 5 | 2009–2017 |
| Milpitas, California, US | 3 | 2019–2021 |