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Inventor

Masahiro Mukoyama

Inventor
Nirasaki, JP

Overview

4→
Patents
2006–2009
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
B08BCleaning in general25%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests25%
PatentTitleYear
7,472,713'Substrate processing apparatus'20097,354,484'Liquid processing apparatus and liquid processing method'20087,275,553'Liquid processing apparatus and liquid processing method'20077,063,094'Substrate processing apparatus'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006–2009Patents assigned to TOKYO ELECTRON LTD (4)· patent assignee history
2006–2009Based in Nirasaki, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD42006–2009
Locations
LocationPatentsSpan
Nirasaki, JP42006–2009