Inventor
Michiro Sugitani
Inventor
Niihama, JP
Overview
Patents· 15 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps42%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
G21KHandling of particles or ionising radiation not otherwise provided for8%
H10DInorganic electric semiconductor devices8%
G05DSystems for controlling or regulating non-electric variables4%
H01LSemiconductor devices4%
H05HPlasma technique4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
9,023,720'Manufacturing method of semiconductor device'20158,163,635'Manufacturing method of semiconductor device'20127,597,531'Method of controlling mover device'20097,315,034'Irradiation system with ion beam/charged particle beam'20087,304,319'Wafer charge compensation device and ion implantation system having the same'20077,187,143'Mover device and semiconductor manufacturing apparatus and method'20076,984,833'Ion implanter and method for controlling the same'20066,815,697'Ion beam charge neutralizer and method therefor'20046,797,968'Ion beam processing method and apparatus therefor'20046,794,661'Ion implantation apparatus capable of increasing beam current'20046,635,889'Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof'20036,573,517'Ion implantation apparatus'20036,242,747'Method and system for optimizing linac operational parameters'20016,194,734'Method and system for operating a variable aperture in an ion implanter'20015,760,409'Dose control for use in an ion implanter'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2009Based in Niihama, JP· patent location history
2001Patents assigned to AXCELIS TECH INC (2)· patent assignee history
2003–2007Patents assigned to SUMITOMO EATON NOVA (7)· patent assignee history
2004–2012Based in Ehime, JP· patent location history
2007–2009Patents assigned to SEN CORP AN SHI AND AXCELIS CO (3)· patent assignee history
2012–2015Patents assigned to FUSE GENSHU (2)· patent assignee history
2012–2015Patents assigned to SEN CORP (2)· patent assignee history
2015Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SUMITOMO EATON NOVA | 7 | 2003–2007 |
| SEN CORP AN SHI AND AXCELIS CO | 3 | 2007–2009 |
| AXCELIS TECH INC | 2 | 2001 |
| FUSE GENSHU | 2 | 2012–2015 |
| SEN CORP | 2 | 2012–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Niihama, JP | 9 | 1998–2009 |
| Ehime, JP | 5 | 2004–2012 |
| Tokyo, JP | 1 | 2015 |