Inventor
Balasubramanian Ramachandran
Inventor
Santa Clara, CA, US
Overview
Patents· 35 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
H01LSemiconductor devices13%
C23CCoating metallic material11%
C30BSingle-crystal growth6%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light5%
H04BTransmission5%
H05BElectric heating5%
B08BCleaning in general3%
F27BFurnaces, kilns, ovens or retorts in general3%
F27DDetails or accessories of furnaces, kilns, ovens or retorts, in so far as they are of kinds occurring in more than one kind of furnace3%
PatentTitleYear
10,306,708Absorbing reflector for semiconductor processing chamber201910,179,354Optical endpoint detection system201910,077,508Multizone control of lamps in a conical lamphead using pyrometers201810,062,598Thermal processing susceptor20189,914,999'Oxidized showerhead and process kit parts and methods of using same'20189,870,919'Process chamber having separate process gas and purge gas regions'20189,842,753'Absorbing lamphead face'20179,832,816Absorbing reflector for semiconductor processing chamber20179,580,835'Multizone control of lamps in a conical lamphead using pyrometers'20179,532,401'Susceptor support shaft with uniformity tuning lenses for EPI process'20169,347,132'Optical endpoint detection system'20169,230,837'Multizone control of lamps in a conical lamphead using pyrometers'20169,127,360'Epitaxial chamber with cross flow'20159,117,661'Method of improving oxide growth rate of selective oxidation processes'20158,953,716'DC offset estimation and compensaton for wideband systems'20158,821,643'In-situ chamber cleaning for an RTP chamber'20148,772,055'Multizone control of lamps in a conical lamphead using pyrometers'20148,546,271'Method of improving oxide growth rate of selective oxidation processes'20138,513,626'Method and apparatus for reducing patterning effects on a substrate during radiation-based heating'20138,217,574'Lamp with internal fuse system'20128,109,669'Temperature uniformity measurement during thermal processing'20127,951,728'Method of improving oxide growth rate of selective oxidation processes'20117,778,533'Semiconductor thermal process control'20107,667,162'Semiconductor thermal process control utilizing position oriented temperature generated thermal mask'20107,515,929'Receiver for a multimode radio'20097,502,625'Integrated multi-band transceiver for use in mobile communication device'20097,415,264'Low noise filter for a wireless receiver'20087,398,693'Adaptive control method for rapid thermal processing of a substrate'20087,130,596'Dynamically varying linearity system for an RF front-end of a communication device'20067,127,367'Tailored temperature uniformity'20067,112,763'Method and apparatus for low temperature pyrometry useful for thermally processing silicon wafers'20066,897,131'Advances in spike anneal processes for ultra shallow junctions'20056,888,104'Thermally matched support ring for substrate processing chamber'20056,674,999'Dynamically varying linearity system for an RF front-end of a communication device'20046,560,446'Dynamically varying linearity system for an RF front-end of a communication device'2003Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2003–2009Based in Irvine, CA, US· patent location history
2004–2009Patents assigned to SKYWORKS SOLUTIONS INC (5)· patent assignee history
2005–2019Patents assigned to APPLIED MATERIALS INC (28)· patent assignee history
2005–2019Based in Santa Clara, CA, US· patent location history
2012–2018Patents assigned to RAMACHANDRAN BALASUBRAMANIAN (9)· patent assignee history
2012–2018Patents assigned to RANISH JOSEPH M (3)· patent assignee history
2014–2018Patents assigned to BRILLHART PAUL (2)· patent assignee history
2015Based in Hyderabad, IN· patent location history
2017–2018Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 28 | 2005–2019 |
| RAMACHANDRAN BALASUBRAMANIANself | 9 | 2012–2018 |
| SKYWORKS SOLUTIONS INC | 5 | 2004–2009 |
| RANISH JOSEPH M | 3 | 2012–2018 |
| BRILLHART PAUL | 2 | 2014–2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Santa Clara, California, US | 26 | 2005–2019 |
| Irvine, California, US | 6 | 2003–2009 |
| Cupertino, California, US | 2 | 2017–2018 |
| Hyderabad, IN | 1 | 2015 |