Inventor
Tien Fak Tan
Inventor
Campbell, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps31%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
H01LSemiconductor devices19%
H05HPlasma technique12%
C23CCoating metallic material4%
H10DInorganic electric semiconductor devices4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
11,101,136Process window widening using coated parts in plasma etch processes202110,920,319Ceramic showerheads with conductive electrodes202110,699,879Two piece electrode assembly with gap for plasma control202010,522,371Systems and methods for improved semiconductor etching and component protection201910,504,754Systems and methods for improved semiconductor etching and component protection201910,297,458Process window widening using coated parts in plasma etch processes20199,972,477Multiple point gas delivery apparatus for etching materials20189,659,753'Grooved insulator to reduce leakage current'20178,333,842'Apparatus for etching semiconductor wafers'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2021Patents assigned to APPLIED MATERIALS INC (9)· patent assignee history
2012Patents assigned to LUBOMIRSKY DMITRY (1)· patent assignee history
2012Patents assigned to TAN TIEN FAK (1)· patent assignee history
2012Patents assigned to TSUEI LUN (1)· patent assignee history
2012Based in Fremont, CA, US· patent location history
2017–2021Based in Campbell, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 9 | 2012–2021 |
| LUBOMIRSKY DMITRY | 1 | 2012 |
| TAN TIEN FAKself | 1 | 2012 |
| TSUEI LUN | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Campbell, California, US | 8 | 2017–2021 |
| Fremont, California, US | 1 | 2012 |