Inventor
Yen-Kun Wang
Inventor
Union City, CA, US
Overview
Patents· 26 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
C23CCoating metallic material23%
H01JElectric discharge tubes or discharge lamps19%
Y10TTechnical subjects covered by former us classification7%
C03BManufacture, shaping, or supplementary processes4%
H01LSemiconductor devices4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
C30BSingle-crystal growth2%
E05FDevices for moving wings into open or closed position2%
E05YIndexing scheme associated with subclasses e05d and e05f, relating to construction elements, electric control, power supply, power signal or transmission, user interfaces, mounting or coupling, details, accessories, auxiliary operations not otherwise provided for, application thereof2%
PatentTitleYear
10,937,614Switch module with a built-in structure of anti-surge and linkage disconnection2021D0909356Mobile phone2021RE047275Substrate support providing gap height and planarization adjustment in plasma processing chamber20199,093,483'Showerhead electrode assembly with gas flow modification for extended electrode life'20158,895,452'Substrate support providing gap height and planarization adjustment in plasma processing chamber'20148,709,202'Upper electrode backing member with particle reducing features'20148,702,866'Showerhead electrode assembly with gas flow modification for extended electrode life'20148,628,675'Method for reduction of voltage potential spike during dechucking'20148,624,210'Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates'20148,492,736'Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates'20138,313,612'Method and apparatus for reduction of voltage potential spike during dechucking'20127,854,820'Upper electrode backing member with particle reducing features'20107,841,582'Variable seal pressure slit valve doors for semiconductor manufacturing equipment'20107,754,282'Adjusting a spacing between a gas distribution member and a substrate support'20107,722,719'Gas baffle and distributor for semiconductor processing chamber'20107,456,116'Gap-fill depositions in the formation of silicon containing dielectric materials'20087,335,609'Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials'20087,204,888'Lift pin assembly for substrate processing'20077,205,205'Ramp temperature techniques for improved mean wafer before clean'20077,192,486'Clog-resistant gas delivery system'20077,011,710'Concentration profile on demand gas delivery system (individual divert delivery system)'20066,506,994'Low profile thick film heaters in multi-slot bake chamber'20036,176,198'Apparatus and method for depositing low K dielectric materials'20016,148,761'Dual channel gas distribution plate'20005,968,588'In-situ liquid flow rate estimation and verification by sonic flow method'19995,866,795'Liquid flow rate estimation and verification by direct liquid measurement'1999Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1999–2010Patents assigned to APPLIED MATERIALS INC (14)· patent assignee history
1999–2010Based in Fremont, CA, US· patent location history
2008–2019Based in Union City, CA, US· patent location history
2010–2019Patents assigned to LAM RES CORP (10)· patent assignee history
2012–2014Patents assigned to WANG YEN-KUN VICTOR (3)· patent assignee history
2013–2014Patents assigned to AUGUSTINO JASON (3)· patent assignee history
2014Patents assigned to COMENDANT KEITH (2)· patent assignee history
2021Based in Taoyuan, TW· patent location history
2021Based in Beijing, CN· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 14 | 1999–2010 |
| LAM RES CORP | 10 | 2010–2019 |
| AUGUSTINO JASON | 3 | 2013–2014 |
| WANG YEN-KUN VICTORself | 3 | 2012–2014 |
| COMENDANT KEITH | 2 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Union City, California, US | 12 | 2008–2019 |
| Fremont, California, US | 12 | 1999–2010 |
| Taoyuan, TW | 1 | 2021 |
| Beijing, CN | 1 | 2021 |