LexDanaLexDanabeta
Inventor

Sheng-Wei Wu

Inventor
Zhubei City, TW

Overview

3→
Patents
2015–2021
Patent span
Physics
Primary field (CPC G)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
F26BDrying solid materials or objects by removing liquid therefrom11%
G01KMeasuring temperature11%
G01NInvestigating or analysing materials by determining their chemical or physical properties11%
G01RMeasuring electric variables11%
G06TImage data processing or generation, in general11%
PatentTitleYear
10,962,285Wafer drying system202110,943,804Monitoring of process chamber20219,127,987'Channel, system and method for monitoring voltages'2015

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2015Patents assigned to GREENLIGHT INNOVATION CORP (1)· patent assignee history
2015Patents assigned to KAZEMIR STEVEN SCOTT (1)· patent assignee history
2015Patents assigned to LEUNG HENRY HON-YIU (1)· patent assignee history
2015Patents assigned to OLFERT MARK RANDALL (1)· patent assignee history
2015Based in Burnaby, CA· patent location history
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (2)· patent assignee history
2021Based in Zhubei City, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD22021
GREENLIGHT INNOVATION CORP12015
KAZEMIR STEVEN SCOTT12015
LEUNG HENRY HON-YIU12015
OLFERT MARK RANDALL12015
Locations
LocationPatentsSpan
Zhubei City, TW22021
Burnaby, CA12015