Inventor
MANABU HONMA
Inventor
JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices25%
B05CApparatus for applying fluent materials to surfaces, in general6%
H01JElectric discharge tubes or discharge lamps6%
Y02PClimate change mitigation technologies in the production or processing of goods3%
PatentTitleYear
12,571,098Apparatus and method for performing film forming process on substrates in substrate processing chambers202612,385,136Apparatus for performing film forming process on substrate, and method of exhausting processing gas from apparatus for performing film forming process on substrate202512,385,132Substrate processing apparatus and substrate processing method202512,359,302Film deposition apparatus and film deposition method202512,297,536Substrate processing apparatus and substrate processing method202512,247,287Apparatus for performing film forming process on substrate and method of using vacuum chuck mechanism provided in the apparatus202512,091,753Substrate processing apparatus202411,869,798Deposition apparatus202411,702,747Rotation driving mechanism and rotation driving method, and substrate processing apparatus and substrate processing method using same202311,674,225Substrate processing apparatus202311,492,702Film-forming apparatus and film-forming method202211,339,472Substrate processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to TOKYO ELECTRON LTD (12)· patent assignee history
2022–2026Based in JP· patent location history
2023Patents assigned to TOKYO ELECTRON LIMTED (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 12 | 2022–2026 |
| TOKYO ELECTRON LIMTED | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 12 | 2022–2026 |