Inventor
Stuardo Robles
Inventor
Sunnyvale, CA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
B05DProcesses for applying fluent materials to surfaces, in general8%
H01JElectric discharge tubes or discharge lamps8%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests8%
B08BCleaning in general6%
B01DSeparation3%
Y02CCapture, storage, sequestration or disposal of greenhouse gases [ghg]3%
PatentTitleYear
6,663,713'Method and apparatus for forming a thin polymer layer on an integrated circuit structure'20036,374,770'Apparatus for improving film stability of halogen-doped silicon oxide films'20026,277,347'Use of ozone in process effluent abatement'20016,121,164'Method for forming low compressive stress fluorinated ozone/TEOS oxide film'20006,103,601'Method and apparatus for improving film stability of halogen-doped silicon oxide films'20006,047,713'Method for cleaning a throttle valve'20006,035,803'Method and apparatus for controlling the deposition of a fluorinated carbon film'20006,009,827'Apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films'20005,958,510'Method and apparatus for forming a thin polymer layer on an integrated circuit structure'19995,814,377'Method and apparatus for creating strong interface between in-situ SACVD and PECVD silicon oxide films'19985,804,259'Method and apparatus for depositing a multilayered low dielectric constant film'19985,707,451'Method and apparatus for cleaning a throttle valve'19985,648,175'Chemical vapor deposition reactor system and integrated circuit'1997Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1997–2003Patents assigned to APPLIED MATERIALS INC (13)· patent assignee history
1997–2003Based in Sunnyvale, CA, US· patent location history
2000Based in Cupertino, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 13 | 1997–2003 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 12 | 1997–2003 |
| Cupertino, California, US | 1 | 2000 |