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Inventor

Marcus Joseph Elisabeth Godfried Breukers

Inventor
Eindhoven, NL

Overview

4→
Patents
2006–2019
Patent span
Physics
Primary field (CPC G)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
10,175,587Lithographic apparatus and device manufacturing method20198,891,063'Lithographic apparatus and device manufacturing method'20147,352,436'Lithographic apparatus, projection apparatus and device manufacturing method'20087,148,950'Lithographic apparatus and device manufacturing method'2006

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2006–2019Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2006–2019Based in Eindhoven, NL· patent location history
2014Patents assigned to BOSCH NIELS JOHANNES MARIA (1)· patent assignee history
2014Patents assigned to BREUKERS MARCUS JOSEPH ELISABETH GODFRIED (1)· patent assignee history
2014Patents assigned to HEERTJES MARCEL FRANÇOIS (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV42006–2019
BOSCH NIELS JOHANNES MARIA12014
BREUKERS MARCUS JOSEPH ELISABETH GODFRIEDself12014
HEERTJES MARCEL FRANÇOIS12014
Locations
LocationPatentsSpan
Eindhoven, NL42006–2019