Inventor
Matthew Wormington
Inventor
Littleton, CO, US
Overview
Patents· 20 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties49%
H01JElectric discharge tubes or discharge lamps11%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices8%
G01BMeasuring length, thickness or similar linear dimensions5%
G01TMeasurement of nuclear or x-radiation5%
H01LSemiconductor devices5%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h105%
G01CMeasuring distances, levels or bearings3%
G01SRadio direction-finding3%
G21KHandling of particles or ionising radiation not otherwise provided for3%
PatentTitleYear
10,976,269Wafer alignment for small-angle x-ray scatterometry202110,976,268X-ray source optics for small-angle X-ray scatterometry202110,976,270X-ray detection optics for small-angle X-ray scatterometry202110,816,487Image contrast in X-ray topography imaging for defect inspection202010,634,628X-ray fluorescence apparatus for contamination monitoring202010,386,313Closed-loop control of X-ray knife edge20199,829,448Measurement of small features using XRF20179,726,624'Using multiple sources/detectors for high-throughput X-ray topography measurement'20179,666,322'X-ray source assembly'20179,606,073'X-ray scatterometry apparatus'20179,389,192'Estimation of XRF intensity from an array of micro-bumps'20169,390,984'X-ray inspection of bumps on a semiconductor substrate'20168,781,070'Detection of wafer-edge defects'20148,731,138'High-resolution X-ray diffraction measurement with enhanced sensitivity'20148,687,766'Enhancing accuracy of fast high-resolution X-ray diffractometry'20148,565,379'Combining X-ray and VUV analysis of thin film layers'20138,437,450'Fast measurement of X-ray diffraction from tilted layers'20138,243,878'High-resolution X-ray diffraction measurement with enhanced sensitivity'20126,782,076'X-ray topographic system'20046,192,103'Fitting of X-ray scattering data using evolutionary algorithms'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001Based in Englewood, CO, US· patent location history
2004–2021Based in Littleton, CO, US· patent location history
2012–2016Patents assigned to JORDAN VALLEY SEMICONDUCTORS (7)· patent assignee history
2012–2014Patents assigned to WORMINGTON MATTHEW (6)· patent assignee history
2012–2014Patents assigned to BERMAN DAVID (4)· patent assignee history
2016–2021Patents assigned to BRUKER JV ISRAEL LTD (12)· patent assignee history
2020–2021Patents assigned to BRUKER TECH LTD (5)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BRUKER JV ISRAEL LTD | 12 | 2016–2021 |
| JORDAN VALLEY SEMICONDUCTORS | 7 | 2012–2016 |
| WORMINGTON MATTHEWself | 6 | 2012–2014 |
| BRUKER TECH LTD | 5 | 2020–2021 |
| BERMAN DAVID | 4 | 2012–2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Littleton, CO, US | 19 | 2004–2021 |
| Englewood, CO, US | 1 | 2001 |