Inventor
Fengji Yeh
Inventor
Wilmington, DE, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1016%
C08GMacromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds14%
B24DTools for grinding, buffing or sharpening13%
H01LSemiconductor devices13%
G02BOptical elements, systems or apparatus4%
H01FMagnets4%
Y10TTechnical subjects covered by former us classification4%
B23BTurning2%
B23CMilling2%
PatentTitleYear
10,875,144Chemical mechanical polishing pad202010,144,115Method of making polishing layer for chemical mechanical polishing pad201810,105,825Method of making polishing layer for chemical mechanical polishing pad20189,776,300'Chemical mechanical polishing pad and method of making same'20179,586,305'Chemical mechanical polishing pad and method of making same'20179,259,820'Chemical mechanical polishing pad with polishing layer and window'20169,238,295'Soft and conditionable chemical mechanical window polishing pad'20169,238,296'Multilayer chemical mechanical polishing pad stack with soft and conditionable polishing layer'20169,233,451'Soft and conditionable chemical mechanical polishing pad stack'20169,144,880'Soft and conditionable chemical mechanical polishing pad'20159,102,034'Method of chemical mechanical polishing a substrate'20159,064,806'Soft and conditionable chemical mechanical polishing pad with window'20158,980,749'Method for chemical mechanical polishing silicon wafers'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015–2020Patents assigned to DOW GLOBAL TECHNOLOGIES LLC (11)· patent assignee history
2015–2016Patents assigned to ROHM & HAAS ELECT MAT (8)· patent assignee history
2015Patents assigned to NITTA HAAS INC (1)· patent assignee history
2015–2018Based in Wilmington, DE, US· patent location history
2017–2020Patents assigned to ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC (5)· patent assignee history
2020Patents assigned to ROHM AND HAAS ELECTRONIC MAT CMP HOLDINGS I (1)· patent assignee history
2020Based in Hsinchu, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| DOW GLOBAL TECHNOLOGIES LLC | 11 | 2015–2020 |
| ROHM & HAAS ELECT MAT | 8 | 2015–2016 |
| ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC | 5 | 2017–2020 |
| NITTA HAAS INC | 1 | 2015 |
| ROHM AND HAAS ELECTRONIC MAT CMP HOLDINGS I | 1 | 2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Wilmington, Delaware, US | 12 | 2015–2018 |
| Hsinchu, TW | 1 | 2020 |