LexDanaLexDanabeta
Inventor

Kenichirou Matsuyama

Inventor
Koshi, JP

Overview

6→
Patents
2013–2015
Patent span
Electricity
Primary field (CPC H)

Patents· 6 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices20%
B05DProcesses for applying fluent materials to surfaces, in general7%
PatentTitleYear
9,153,467'Substrate processing apparatus, substrate processing method and non-transitory computer-readable storage medium'20159,004,788'Substrate processing apparatus, substrate processing method, and storage medium'20158,916,229'Substrate processing method'20148,588,952'Substrate processing system, substrate processing method and storage medium'20138,560,108'Substrate processing apparatus and substrate processing method'20138,448,600'Substrate processing apparatus, substrate processing method, and storage medium'2013

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2013–2015Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2013–2014Patents assigned to MATSUYAMA KENICHIROU (4)· patent assignee history
2013Patents assigned to MATSUMOTO TAKESHI (2)· patent assignee history
2013Patents assigned to KANEKO TOMOHIRO (1)· patent assignee history
2013–2015Based in Koshi, JP· patent location history
2014Patents assigned to MIYATA AKIRA (1)· patent assignee history
2015Based in Kumamoto, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD62013–2015
MATSUYAMA KENICHIROUself42013–2014
MATSUMOTO TAKESHI22013
KANEKO TOMOHIRO12013
MIYATA AKIRA12014
Locations
LocationPatentsSpan
Koshi, JP52013–2015
Kumamoto, JP12015