Inventor
Walter Benjamin Glenn
Inventor
Pacifica, CA, US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material39%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1039%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1011%
H01JElectric discharge tubes or discharge lamps7%
C30BSingle-crystal growth4%
PatentTitleYear
8,123,860'Apparatus for cyclical depositing of thin films'20127,923,069'Multi-station deposition apparatus and method'20117,794,789'Multi-station deposition apparatus and method'20107,547,644'Methods and apparatus for forming barrier layers in high aspect ratio vias'20097,547,465'Multi-station deposition apparatus and method'20097,175,713'Apparatus for cyclical deposition of thin films'20076,974,771'Methods and apparatus for forming barrier layers in high aspect ratio vias'20056,932,871'Multi-station deposition apparatus and method'20056,875,271'Simultaneous cyclical deposition in different processing regions'20056,866,746'Clamshell and small volume chamber with fixed substrate support'20056,784,096'Methods and apparatus for forming barrier layers in high aspect ratio vias'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2012Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history
2004–2012Based in Pacifica, CA, US· patent location history
2012Patents assigned to AL-SHAIKH AYAD A (1)· patent assignee history
2012Patents assigned to GELATOS AVGERINOS V (1)· patent assignee history
2012Patents assigned to GLENN WALTER BENJAMIN (1)· patent assignee history
2012Patents assigned to KHAN AHMAD A (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 11 | 2004–2012 |
| AL-SHAIKH AYAD A | 1 | 2012 |
| GELATOS AVGERINOS V | 1 | 2012 |
| GLENN WALTER BENJAMINself | 1 | 2012 |
| KHAN AHMAD A | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Pacifica, California, US | 11 | 2004–2012 |