LexDanaLexDanabeta
Inventor

Hueng-Jik Lee

Inventor
Kyungki-do, KR

Overview

1→
Patents
1998
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h10100%
PatentTitleYear
5,778,969'Apparatus for thermal treatment of thin wafers'1998

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1998Patents assigned to NOVELLUS SYSTEMS INC (1)· patent assignee history
1998Based in Kyungki-do, KR· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NOVELLUS SYSTEMS INC11998
Locations
LocationPatentsSpan
Kyungki-do, KR11998