Inventor
Richard H. Gould
Inventor
Fremont, CA, US
Overview
Patents· 39 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
H01LSemiconductor devices24%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests16%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors12%
F02PIgnition, other than compression ignition, for internal-combustion engines2%
B25JManipulators1%
B66CCranes1%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices1%
H10BElectronic memory devices1%
Y10TTechnical subjects covered by former us classification1%
PatentTitleYear
10,790,174Wafer transport assembly with integrated buffers202010,593,583Integrated systems for interfacing with substrate container storage systems202010,566,216Equipment front end module gas recirculation202010,559,483Platform architecture to improve system productivity202010,515,834Multi-station tool with wafer transfer microclimate systems201910,483,142Vacuum robot positioning system with reduced sensitivity to chamber pressure201910,304,707Load lock interface and integrated post-processing module201910,297,480Buffer station with single exit-flow direction201910,249,521Wet-dry integrated wafer processing system201910,153,282Ultra-high vacuum transport and storage201810,062,589Front opening ring pod201810,062,590Front opening ring pod201810,014,196Wafer transport assembly with integrated buffers20189,929,028'Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs'20189,881,820'Front opening ring pod'20189,881,826'Buffer station with single exit-flow direction'20189,842,756'Integrated systems for interfacing with substrate container storage systems'20179,698,036'Stacked wafer cassette loading system'20179,502,275'Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs'20168,882,433'Integrated systems for interfacing with substrate container storage systems'20148,851,820'Substrate container storage system'20148,851,817'Universal modular wafer transport system'20147,841,820'Universal modular wafer transport system'20107,648,327'Wafer engine'20107,293,950'Universal modular wafer transport system'20077,217,076'Semiconductor material handling system'20077,100,340'Unified frame for semiconductor material handling system'20067,066,707'Wafer engine'20066,677,690'System for safeguarding integrated intrabay pod delivery and storage system'20046,575,687'Wafer transport system'20036,533,101'Integrated transport carrier and conveyor system'20036,494,308'Integrated roller transport pod and asynchronous conveyor'20026,481,558'Integrated load port-conveyor transfer system'20026,468,021'Integrated intra-bay transfer, storage, and delivery system'20026,435,330'In/out load port transfer mechanism'20026,308,818'Transport system with integrated transport carrier and directors'20016,223,886'Integrated roller transport pod and asynchronous conveyor'20013,948,232'Altitude compensated nonlinear vacuum spark advance control system'19763,933,166'Altitude compensated vacuum regulating valve'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976Based in Troy, MI, US· patent location history
2001–2007Patents assigned to ASYST TECHNOLOGIES (13)· patent assignee history
2001–2020Based in Fremont, CA, US· patent location history
2014–2020Patents assigned to BROOKS AUTOMATION INC (5)· patent assignee history
2014Patents assigned to BONORA ANTHONY C (3)· patent assignee history
2014Patents assigned to GOULD RICHARD H (3)· patent assignee history
2014Based in Fermont, CA, US· patent location history
2016–2020Patents assigned to LAM RES CORP (16)· patent assignee history
2020Based in Fremond, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 16 | 2016–2020 |
| ASYST TECHNOLOGIES | 13 | 2001–2007 |
| BROOKS AUTOMATION INC | 5 | 2014–2020 |
| BONORA ANTHONY C | 3 | 2014 |
| GOULD RICHARD Hself | 3 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 35 | 2001–2020 |
| Troy, MI, US | 2 | 1976 |
| Fremond, California, US | 1 | 2020 |
| Fermont, California, US | 1 | 2014 |