Inventor
JEROEN PIETER STARREVELD
Inventor
NL
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices67%
F16FSprings33%
PatentTitleYear
11,828,344Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method202311,550,227Projection system and lithographic apparatus comprising said projection system202311,422,477Vibration isolation system and lithographic apparatus202211,269,262Frame assembly, lithographic apparatus and device manufacturing method2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2023Patents assigned to ASML NETHERLANDS BV (4)· patent assignee history
2022–2023Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 4 | 2022–2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 4 | 2022–2023 |