Inventor
NANCY FUNG
Inventor
US
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1028%
H01LSemiconductor devices26%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
H10BElectronic memory devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
C23CCoating metallic material5%
C23FNon-mechanical removal of metallic material from surface5%
H01JElectric discharge tubes or discharge lamps5%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation3%
PatentTitleYear
12,486,559Method of metal oxide infiltration into photoresist202512,374,557Methods for etching structures with oxygen pulsing202512,283,484Selective deposition of carbon on photoresist layer for lithography applications202512,249,509Selective deposition of carbon on photoresist layer for lithography applications202511,776,811Selective deposition of carbon on photoresist layer for lithography applications202311,658,043Selective anisotropic metal etch202311,658,042Methods for etching structures and smoothing sidewalls202311,638,374Multicolor approach to DRAM STI active cut patterning202311,527,414Methods for etching structures with oxygen pulsing202211,437,238Patterning scheme to improve EUV resist and hard mask selectivity202211,335,690Multicolor approach to DRAM STI active cut patterning2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to APPLIED MATERIALS INC (11)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 11 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 11 | 2022–2025 |