Inventor
Govinda Raj
Inventor
Bangalore, IN
Overview
Patents· 19 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H01LSemiconductor devices16%
H01JElectric discharge tubes or discharge lamps13%
C23CCoating metallic material7%
B33YAdditive manufacturing, i.e. manufacturing of three-dimensional [3d] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3d printing, stereolithography or selective laser sintering6%
B22FWorking metallic powder4%
Y02PClimate change mitigation technologies in the production or processing of goods4%
Y10TTechnical subjects covered by former us classification4%
G01KMeasuring temperature3%
G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure3%
PatentTitleYear
11,114,326Substrate chucking and dechucking methods202111,054,317Method and apparatus for direct measurement of chucking force on an electrostatic chuck202110,879,046Substrate support with real time force and film stress control202010,777,3913D printed chamber components configured for lower film stress and lower operating temperature202010,662,529Cooled gas feed block with baffle and nozzle for HDP-CVD202010,648,788Substrate distance monitoring202010,553,473Edge ring for a substrate processing chamber202010,515,843Amalgamated cover ring201910,290,459Magnetron having enhanced cooling characteristics201910,190,701Corrosion control for chamber components201910,177,014Thermal radiation barrier for substrate processing chamber components201910,168,229EMI/RF shielding of thermocouples201910,141,153Magnetron having enhanced cooling characteristics201810,049,908Methods and apparatus for electrostatic chuck repair and refurbishment201810,005,025Corrosion resistant abatement system20189,823,133'EMI/RF shielding of thermocouples'20179,613,846'Pad design for electrostatic chuck surface'20179,349,630'Methods and apparatus for electrostatic chuck repair and refurbishment'20165,120,776'Process for chemical treatment of discontinuous cellulosic fibers and composites of polyethylene and treated fibers'1992Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1992–2017Patents assigned to RAJ GOVINDA (2)· patent assignee history
1992Based in Trois-Rivières, CA· patent location history
2016–2021Patents assigned to APPLIED MATERIALS INC (18)· patent assignee history
2016–2020Based in Bangalore, IN· patent location history
2017Patents assigned to BADUVAMANDA CARIAPPA (1)· patent assignee history
2017Patents assigned to BHATNAGAR ASHISH (1)· patent assignee history
2017Patents assigned to ICHETTRIA BOPANNA (1)· patent assignee history
2019–2021Based in Santa Clara, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 18 | 2016–2021 |
| RAJ GOVINDAself | 2 | 1992–2017 |
| BADUVAMANDA CARIAPPA | 1 | 2017 |
| BHATNAGAR ASHISH | 1 | 2017 |
| ICHETTRIA BOPANNA | 1 | 2017 |
Locations
| Location | Patents | Span |
|---|---|---|
| Bangalore, IN | 15 | 2016–2020 |
| Santa Clara, California, US | 3 | 2019–2021 |
| Trois-Rivières, CA | 1 | 1992 |