Inventor
Vladimir Vitalevich Ivanov
Inventor
Moscow, RU
Overview
Patents· 17 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices38%
H05GX-ray technique26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
B82YSpecific uses or applications of nanostructures10%
G21KHandling of particles or ionising radiation not otherwise provided for5%
H05KPrinted circuits5%
G06FElectric digital data processing2%
H05HPlasma technique2%
PatentTitleYear
10,942,737Method, device and system for control signalling in a data path module of a data stream processing engine20219,411,250'Radiation system and lithographic apparatus'20169,366,967'Radiation source'20169,363,879'Module and method for producing extreme ultraviolet radiation'20169,307,624'Lithographic apparatus'20168,901,521'Module and method for producing extreme ultraviolet radiation'20148,755,032'Radiation source and lithographic apparatus'20148,685,632'Radiation source, lithographic apparatus and device manufacturing method'20148,493,548'Lithographic apparatus and device manufacturing method'20138,368,040'Radiation system and lithographic apparatus'20138,317,929'Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus'20128,294,128'Apparatus with plasma radiation source and method of forming a beam of radiation'20128,242,473'Radiation source'20127,872,244'Lithographic apparatus and device manufacturing method'20117,825,390'Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus'20107,772,570'Assembly for blocking a beam of radiation and method of blocking a beam of radiation'20107,763,871'Radiation source'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2016Patents assigned to ASML NETHERLANDS BV (16)· patent assignee history
2010–2016Based in Moscow, RU· patent location history
2012–2016Patents assigned to IVANOV VLADIMIR VITALEVICH (11)· patent assignee history
2012–2016Patents assigned to BANINE VADIM YEVGENYEVICH (9)· patent assignee history
2012–2016Patents assigned to KRIVTSUN VLADIMIR MIHAILOVITCH (6)· patent assignee history
2013–2016Patents assigned to LOOPSTRA ERIK ROELOF (5)· patent assignee history
2021Based in St. Petersburg, RU· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 16 | 2010–2016 |
| IVANOV VLADIMIR VITALEVICHself | 11 | 2012–2016 |
| BANINE VADIM YEVGENYEVICH | 9 | 2012–2016 |
| KRIVTSUN VLADIMIR MIHAILOVITCH | 6 | 2012–2016 |
| LOOPSTRA ERIK ROELOF | 5 | 2013–2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Moscow, RU | 16 | 2010–2016 |
| St. Petersburg, RU | 1 | 2021 |