Inventor
Dennis K. Coultas
Inventor
Hopewell Junction, NY, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps55%
C23CCoating metallic material15%
H05HPlasma technique10%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling5%
G21KHandling of particles or ionising radiation not otherwise provided for5%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h105%
Y10TTechnical subjects covered by former us classification5%
PatentTitleYear
6,051,151'Apparatus and method of producing a negative ion plasma'20006,028,394'Cold electron plasma reactive ion etching using a rotating electromagnetic filter'20005,866,985'Stable matching networks for plasma tools'19995,767,628'Helicon plasma processing tool utilizing a ferromagnetic induction coil with an internal cooling channel'19985,543,184'Method of reducing particulates in a plasma tool through steady state flows'19965,518,547'Method and apparatus for reducing particulates in a plasma tool through steady state flows'19965,433,258'Gettering of particles during plasma processing'19955,332,441'Apparatus for gettering of particles during plasma processing'19945,304,279'Radio frequency induction/multipole plasma processing tool'19945,241,245'Optimized helical resonator for plasma processing'19935,207,437'Ceramic electrostatic wafer chuck'19935,206,516'Low energy, steered ion beam deposition system having high current at low pressure'19933,997,846'Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976–2000Patents assigned to IBM (13)· patent assignee history
1976Based in Beacon, NY, US· patent location history
1993–2000Based in Hopewell Junction, NY, US· patent location history
1996Patents assigned to LAM RES CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| IBM | 13 | 1976–2000 |
| LAM RES CORP | 1 | 1996 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hopewell Junction, New York, US | 12 | 1993–2000 |
| Beacon, New York, US | 1 | 1976 |