Inventor
Matthias Illing
Inventor
Kusterdingen, DE
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B81Cprimary
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems19%
B81BMicrostructural devices or systems, e.g. micromechanical devices16%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
G01LMeasuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure9%
G01PMeasuring linear or angular speed, acceleration, deceleration, or shock9%
B60CVehicle tyres3%
G01CMeasuring distances, levels or bearings3%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light3%
H01GCapacitors3%
H01MProcesses or means, e.g. batteries, for the direct conversion of chemical energy into electrical energy3%
PatentTitleYear
8,900,906'Atomic layer deposition strengthening members and method of manufacture'20148,492,850'Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type'20138,405,210'Method for producing a plurality of chips and a chip produced accordingly'20138,389,327'Method for manufacturing chips'20138,317,882'Method of manufacturing a planar electrode with large surface area'20128,148,234'Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure'20127,863,072'Micromechanical diaphragm sensor having a double diaphragm'20117,572,661'Method for manufacturing a micromechanical sensor element'20097,354,786'Sensor element with trenched cavity'20086,989,609'Method and apparatus for supplying energy to sensors'20066,739,193'Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same'20046,360,605'Micromechanical device'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2014Patents assigned to BOSCH GMBH ROBERT (12)· patent assignee history
2002–2014Based in Kusterdingen, DE· patent location history
2004Based in Wannweil, DE· patent location history
2012–2014Patents assigned to ILLING MATTHIAS (6)· patent assignee history
2012–2013Patents assigned to BENZEL HUBERT (4)· patent assignee history
2012–2013Patents assigned to ARMBRUSTER SIMON (3)· patent assignee history
2012–2013Based in Palo Alto, CA, US· patent location history
2013Patents assigned to BOEHRINGER MATTHIAS (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| BOSCH GMBH ROBERT | 12 | 2002–2014 |
| ILLING MATTHIASself | 6 | 2012–2014 |
| BENZEL HUBERT | 4 | 2012–2013 |
| ARMBRUSTER SIMON | 3 | 2012–2013 |
| BOEHRINGER MATTHIAS | 2 | 2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kusterdingen, DE | 7 | 2002–2014 |
| Palo Alto, California, US | 4 | 2012–2013 |
| Wannweil, DE | 1 | 2004 |