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Inventor

Xinliang Lu

Inventor
Fremont, CA, US

Overview

2→
Patents
2021
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
G01NInvestigating or analysing materials by determining their chemical or physical properties17%
H01LSemiconductor devices17%
H05HPlasma technique17%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1017%
PatentTitleYear
11,043,393Ozone treatment for selective silicon nitride etch over silicon202111,039,527Air leak detection in plasma processing apparatus with separation grid2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to BEIJING E TOWN SEMICONDUCTOR TECH CO LTD (2)· patent assignee history
2021Patents assigned to MATTSON TECH INC (2)· patent assignee history
2021Based in Fremont, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
BEIJING E TOWN SEMICONDUCTOR TECH CO LTD22021
MATTSON TECH INC22021
Locations
LocationPatentsSpan
Fremont, California, US22021