Inventor
YU-KUANG SUN
Inventor
TW
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices46%
H05GX-ray technique42%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry8%
G05DSystems for controlling or regulating non-electric variables4%
PatentTitleYear
12,235,586EUV photolithography system fuel source and methods of operating the same202512,167,526Method and system for generating droplets for EUV photolithography processes202412,096,543Method for using radiation source apparatus202412,066,761Inspection tool for an extreme ultraviolet radiation source to observe tin residual202412,063,734Droplet generator assembly and method of replacing components202411,809,083EUV photolithography system fuel source and methods of operating the same202311,576,250Semiconductor processing tool and methods of operation202311,553,581Radiation source apparatus and method for using the same202311,537,053Semiconductor processing tool and methods of operation202211,533,799System and method for supplying target material in an EUV light source202211,528,797Method and system for generating droplets for EUV photolithography processes202211,442,365EUV photolithography system and methods of operating the same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (12)· patent assignee history
2022–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 12 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 12 | 2022–2025 |