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Inventor

ROB CARLO WIEGGERS

Inventor
NL

Overview

2→
Patents
2022–2023
Patent span
Physics
Primary field (CPC G)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H05GX-ray technique33%
PatentTitleYear
11,846,887Prolonging optical element lifetime in an EUV lithography system202311,340,532Prolonging optical element lifetime in an EUV lithography system2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022–2023Patents assigned to ASML NETHERLANDS BV (2)· patent assignee history
2022–2023Based in NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV22022–2023
Locations
LocationPatentsSpan
NL22022–2023