Inventor
Akihiro Yokota
Inventor
Miyagi, JP
Overview
Patents· 21 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps18%
H01LSemiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1014%
C23CCoating metallic material11%
H04NPictorial communication, e.g. television7%
G02BOptical elements, systems or apparatus5%
H05HPlasma technique5%
G07FCoin-freed or like apparatus4%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h104%
A63FCard, board, or roulette games2%
PatentTitleYear
11,133,157Plasma processing apparatus202111,041,241Plasma processing apparatus and temperature control method202110,763,087Plasma processing apparatus202010,651,012Substrate processing method202010,546,723Plasma processing method202010,297,428Plasma processing apparatus20199,978,566Plasma etching method20189,390,943'Substrate processing apparatus'20168,895,454'Etching method of multilayer film'20148,852,387'Plasma processing apparatus and shower head'20147,607,023'Data transfer method, data transfer apparatus, data transmission device, and data reception device'20097,519,722'Information providing method, information processing device, information collection system, communication method, communication system, relay device, and communication device'20097,496,620'Calculation apparatus'20097,472,910'Animation display apparatus, arcade game machine, control method and apparatus thereof, and storage medium'20097,126,768'Projection lens unit'20066,171,421'Prism assembly and method for producing the same'20016,144,499'Projection lens'20004,912,565'Method of and apparatus for recording image in the form of pixel array'19904,812,916'Visual monitoring device which projects an image of a register mark onto a scanning surface for use in setting image processing conditions'19894,617,578'Multi-beam zoom and focusing lens scan pitch-adjusting recorder'19864,055,963'Heating system'1977Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1986–1990Patents assigned to DAINIPPON SCREEN MFG (3)· patent assignee history
1986–1990Based in Kyoto, JP· patent location history
2000–2006Patents assigned to SEKINOS CO LTD (3)· patent assignee history
2000–2006Based in Sano, JP· patent location history
2009Patents assigned to NTI INC (3)· patent assignee history
2009Based in Yokkaichi, JP· patent location history
2014–2021Patents assigned to TOKYO ELECTRON LTD (10)· patent assignee history
2014Patents assigned to ABE JUN (1)· patent assignee history
2014–2021Based in Miyagi, JP· patent location history
2014Based in Yamanashi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 10 | 2014–2021 |
| DAINIPPON SCREEN MFG | 3 | 1986–1990 |
| NTI INC | 3 | 2009 |
| SEKINOS CO LTD | 3 | 2000–2006 |
| ABE JUN | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 9 | 2014–2021 |
| Sano, JP | 3 | 2000–2006 |
| Kyoto, JP | 3 | 1986–1990 |
| Yokkaichi, JP | 2 | 2009 |
| Yamanashi, JP | 1 | 2014 |