Inventor
Gundula Weiss
Inventor
Aalen, DE
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices42%
G02BOptical elements, systems or apparatus26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
B29DProducing particular articles from plastics or from substances in a plastic state5%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them5%
PatentTitleYear
10,146,135Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation20189,946,161Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method20189,052,606'Microlithographic projection exposure apparatus'20159,025,131'Optical beam deflecting element, illumination system including same, and related method'20158,891,057'Microlithographic projection exposure apparatus'20148,724,086'Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation'20148,259,392'Method of producing a diffractive optical element and diffractive optical element produced by such a method'20128,068,279'Optical system of an illumination device of a projection exposure apparatus'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2018Patents assigned to ZEISS CARL SMT GMBH (8)· patent assignee history
2011–2015Patents assigned to WEISS GUNDULA (5)· patent assignee history
2011–2014Patents assigned to FIOLKA DAMIAN (3)· patent assignee history
2011–2014Patents assigned to MAUL MANFRED (3)· patent assignee history
2011–2018Based in Aalen, DE· patent location history
2014Patents assigned to DEGUENTHER MARKUS (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 8 | 2011–2018 |
| WEISS GUNDULAself | 5 | 2011–2015 |
| FIOLKA DAMIAN | 3 | 2011–2014 |
| MAUL MANFRED | 3 | 2011–2014 |
| DEGUENTHER MARKUS | 2 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 8 | 2011–2018 |