Inventor
Ching-Yu Chang
Inventor
Yuansun Village, TW
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices22%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h109%
B05DProcesses for applying fluent materials to surfaces, in general4%
H05KPrinted circuits4%
H10DInorganic electric semiconductor devices4%
PatentTitleYear
11,127,592Photosensitive groups in resist layer202111,112,698Photoresist with gradient composition for improved uniformity202111,106,138Lithography process and material for negative tone development202111,094,541Anti-reflective coating materials202111,079,681Lithography method for positive tone development202111,073,763Photoresist and method202111,069,528Semiconductor device and method202111,054,742EUV metallic resist performance enhancement via additives2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (8)· patent assignee history
2021Based in Yuansun Village, TW· patent location history
2021Based in Yilan County, TW· patent location history
2021Based in Taipei, TW· patent location history
2021Based in Changhua County, TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 8 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| Yuansun Village, TW | 2 | 2021 |
| Yilan County, TW | 1 | 2021 |
| Taipei, TW | 1 | 2021 |
| Changhua County, TW | 1 | 2021 |