Inventor
Paul Graupner
Inventor
Aalen, DE
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices50%
G02BOptical elements, systems or apparatus32%
G01MTesting static or dynamic balance of machines or structures14%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them5%
PatentTitleYear
9,285,685'Lithographic apparatus and device manufacturing method'20169,146,475'Projection exposure system and projection exposure method'20158,570,486'Lithographic apparatus and device manufacturing method'20138,472,006'Lithographic apparatus and device manufacturing method'20138,174,674'Lithographic apparatus and device manufacturing method'20127,715,107'Optical element for correction of aberration, and a lithographic apparatus comprising same'20107,545,481'Lithographic apparatus and device manufacturing method'20097,433,015'Lithographic apparatus and device manufacturing method'20087,301,622'Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements'20076,934,011'Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements'20056,678,240'Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2013Patents assigned to ZEISS CARL SMT AG (8)· patent assignee history
2004–2016Based in Aalen, DE· patent location history
2008–2016Patents assigned to ASML NETHERLANDS BV (7)· patent assignee history
2012–2013Patents assigned to BASELMANS JOHANNES JACOBUS MATHEUS (3)· patent assignee history
2012–2013Patents assigned to GRAUPNER PAUL (3)· patent assignee history
2012–2013Patents assigned to LOOPSTRA ERIK ROELOF (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT AG | 8 | 2004–2013 |
| ASML NETHERLANDS BV | 7 | 2008–2016 |
| BASELMANS JOHANNES JACOBUS MATHEUS | 3 | 2012–2013 |
| GRAUPNER PAULself | 3 | 2012–2013 |
| LOOPSTRA ERIK ROELOF | 3 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Aalen, DE | 11 | 2004–2016 |