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Inventor

IVELIN ANGELOV

Inventor
US

Overview

2→
Patents
2022
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
H01LSemiconductor devices14%
H05HPlasma technique14%
H10DInorganic electric semiconductor devices14%
PatentTitleYear
11,469,079Ultrahigh selective nitride etch to form FinFET devices202211,342,163Variable depth edge ring for etch uniformity control2022

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2022Patents assigned to LAM RES CORP (2)· patent assignee history
2022Based in US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
LAM RES CORP22022
Locations
LocationPatentsSpan
US22022