Inventor
TOSHIO HASEGAWA
Inventor
JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
C23CCoating metallic material17%
H01LSemiconductor devices14%
B01JChemical or physical processes, e.g. catalysis or colloid chemistry7%
C07CAcyclic or carbocyclic compounds7%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices7%
H01JElectric discharge tubes or discharge lamps7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
C07BGeneral methods of organic chemistry3%
G05BControl or regulating systems in general3%
PatentTitleYear
12,509,770Film forming method and film forming apparatus202512,494,369Extreme ultraviolet lithography patterning method202512,434,225Catalyst and a process for the production of ethylenically unsaturated carboxylic acids or esters202512,404,582Method and apparatus for embedding ruthenium in recess formed on substrate surface202512,102,981Catalyst, method for preparing catalyst, and method for producing unsaturated carboxylic acid and/or unsaturated carboxylic acid ester202411,915,931Extreme ultraviolet lithography patterning method202411,873,560Abnormality detection system and control board202411,450,512Plasma processing method202211,387,112Surface processing method and processing system2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2022–2025Based in JP· patent location history
2024Patents assigned to MITSUBISHI CHEM CORP (1)· patent assignee history
2025Patents assigned to MITSUBISHI CHEMICAL UK LTD (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2022–2025 |
| MITSUBISHI CHEM CORP | 1 | 2024 |
| MITSUBISHI CHEMICAL UK LTD | 1 | 2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 9 | 2022–2025 |