Inventor
JUNJI KUNISAWA
Inventor
JP
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H01LSemiconductor devices21%
B08BCleaning in general18%
B24BMachines, devices, or processes for grinding or polishing12%
B01FMixing, e.g. dissolving, emulsifying or dispersing6%
G05DSystems for controlling or regulating non-electric variables6%
B25JManipulators3%
C11DDetergent compositions3%
F24FAir-conditioning3%
Y10TTechnical subjects covered by former us classification3%
PatentTitleYear
12,447,449Chemical supply apparatus, cleaning system, and chemical supply method202512,208,428Liquid supplying device and method for draining liquid thereof202512,140,980Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrate202412,053,851Jig and installation method using same jig202411,967,508Damper control system and damper control method202411,890,652Cleaning chemical liquid supply device and cleaning chemical liquid supply method202411,664,252Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning device202311,532,491Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrate202211,426,834Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method202211,380,559Carrier device, work processing apparatus, control method of carrier device and storage medium storing program2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to EBARA CORP (10)· patent assignee history
2022Patents assigned to HIRATA SPINNING (1)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| EBARA CORP | 10 | 2022–2025 |
| HIRATA SPINNING | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 10 | 2022–2025 |