Inventor
MARIA ISABEL DE LA FUENTE VALENTIN
Inventor
NL
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices35%
G06TImage data processing or generation, in general18%
G01BMeasuring length, thickness or similar linear dimensions12%
G01MTesting static or dynamic balance of machines or structures6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G06FElectric digital data processing6%
G06KGraphical data reading6%
H01LSemiconductor devices6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
12,468,235Method and apparatus to determine a patterning process parameter202511,947,269Method and apparatus to determine a patterning process parameter202411,710,668Method and apparatus to determine a patterning process parameter202311,531,274Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets202211,506,566Method of processing data, method of obtaining calibration data202211,143,972Method and apparatus to determine a patterning process parameter2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to ASML NETHERLANDS BV (6)· patent assignee history
2021–2025Based in NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 6 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| NL | 6 | 2021–2025 |