Inventor
Noriaki Tateno
Inventor
Fukuoka, JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
B23QDetails, components, or accessories for machine tools, e.g. arrangements for copying or controlling17%
H02NElectric machines not otherwise provided for17%
C08FMacromolecular compounds obtained by reactions only involving carbon-to-carbon unsaturated bonds8%
C08GMacromolecular compounds obtained otherwise than by reactions only involving unsaturated carbon-to-carbon bonds8%
F25BRefrigeration machines, plants or systems8%
G05DSystems for controlling or regulating non-electric variables8%
Y10TTechnical subjects covered by former us classification8%
PatentTitleYear
7,615,133'Electrostatic chuck module and cooling system'20097,209,339'Electrostatic chuck for an electrically insulative substrate, and a method of using same'20077,011,744'Brine supply unit'20066,768,627'Electrostatic chuck and processing apparatus for insulative substrate'20043,965,140'Process for the preparation of hydroxyl-terminated liquid polymers'1976Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1976Patents assigned to YOKOHAMA RUBBER CO LTD (1)· patent assignee history
1976Based in Yokohama, JP· patent location history
2004–2009Patents assigned to TOTO LTD (3)· patent assignee history
2004Patents assigned to ULVAC INC (1)· patent assignee history
2004–2009Based in Fukuoka, JP· patent location history
2006Patents assigned to ANELVA CORP (1)· patent assignee history
2009Patents assigned to CANON ANELVA CORP (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOTO LTD | 3 | 2004–2009 |
| ANELVA CORP | 1 | 2006 |
| CANON ANELVA CORP | 1 | 2009 |
| ULVAC INC | 1 | 2004 |
| YOKOHAMA RUBBER CO LTD | 1 | 1976 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fukuoka, JP | 4 | 2004–2009 |
| Yokohama, JP | 1 | 1976 |