Inventor
LIFU LI
Inventor
JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps41%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
B65GTransport or storage devices, e.g. conveyors for loading or tipping, shop conveyor systems or pneumatic tube conveyors6%
G05DSystems for controlling or regulating non-electric variables6%
H01LSemiconductor devices6%
H05BElectric heating6%
H05KPrinted circuits6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
PatentTitleYear
12,482,638Substrate processing apparatus and shutter202512,387,914Upper electrode assembly202512,308,221Substrate processing system and method for installing edge ring202512,217,942Plasma processing apparatus202512,148,598Plasma processing apparatus202411,676,800Substrate processing apparatus and control method of substrate processing apparatus202311,264,248Etching method and substrate processing apparatus2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2022–2025Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 7 | 2022–2025 |