Inventor
KOSUKE TAKAI
Inventor
JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices23%
H01LSemiconductor devices23%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1023%
B08BCleaning in general11%
H01JElectric discharge tubes or discharge lamps6%
B21DWorking or processing of sheet metal or metal tubes, rods or profiles without essentially removing material3%
H10BElectronic memory devices3%
H10DInorganic electric semiconductor devices3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
Y02PClimate change mitigation technologies in the production or processing of goods3%
PatentTitleYear
12,532,696Substrate processing method and substrate processing device202612,326,660Pattern forming method, combined processing apparatus, and recording medium202512,068,244Semiconductor device, template, and method of manufacturing template202411,796,910Template, manufacturing method of template202311,776,823Substrate processing method and substrate processing apparatus202311,682,566Processing apparatus for processing substrates of different types202311,579,537Pattern inspection method and photomask fabrication method202311,443,963Substrate processing method and substrate processing apparatus202211,275,305Method for producing photomask, method for producing semiconductor device, method for forming pattern, and photomask202211,249,391Exposure mask and manufacturing method of same202211,185,895Substrate processing method, substrate processing apparatus, and composite processing apparatus2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021Patents assigned to TOSHIBA MEMORY CORP (1)· patent assignee history
2021–2026Based in JP· patent location history
2022–2026Patents assigned to KIOXIA CORP (10)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KIOXIA CORP | 10 | 2022–2026 |
| TOSHIBA MEMORY CORP | 1 | 2021 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 11 | 2021–2026 |