Inventor
Petrus Marinus Christianus Maria Van Den Biggelaar
Inventor
Nuenen, NL
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices73%
G05BControl or regulating systems in general18%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them9%
PatentTitleYear
8,014,881'Lithographic apparatus and device manufacturing method'20117,679,719'Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method'20107,446,854'Lithographic apparatus and device manufacturing method'20087,295,283'Lithographic apparatus and device manufacturing method'20077,294,844'Lithographic apparatus, device manufacturing method, and device manufactured thereby'20077,289,858'Lithographic motion control system and method'20077,224,428'Lithographic apparatus and device manufacturing method'20077,113,256'Lithographic apparatus and device manufacturing method with feed-forward focus control'20067,016,019'Lithographic apparatus and device manufacturing method'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2011Patents assigned to ASML NETHERLANDS BV (9)· patent assignee history
2006–2011Based in Nuenen, NL· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 9 | 2006–2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Nuenen, NL | 9 | 2006–2011 |